메뉴 건너뛰기




Volumn 89, Issue 1, 2007, Pages 3-11

An innovated process of Pt/PbTiO3/PbZr0.3Ti 0.7O3/PbTiO3/Pt integrated ferroelectric capacitors for FeRAM

Author keywords

Electric properties; Etching; Integrated ferroelectric capacitors; PT PZT PT thin films

Indexed keywords


EID: 48249138010     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580601077401     Document Type: Conference Paper
Times cited : (5)

References (29)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.