Sidewalls contribution in integrated three-dimensional Sr 0.8 Bi 2.2 Ta 2 O 9 -based ferroelectric capacitors

Applied Physics Letters

Volumn 87, Issue 7, 2005, Pages

  Menou, N ^a   Turquat, Ch ^a   Madigou, V ^a   Muller, Ch ^a   Goux, L ^b   Lisoni, J ^b   Schwitters, M ^b   Wouters, D J ^b  

^a UNIVERSITÉ DE TOULON   (France)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC CAPACITORS; LATTICE DISTORTION; PLANAR GEOMETRY; SIDEWALLS CONTRIBUTION;

COMPUTATIONAL GEOMETRY; FERROELECTRIC DEVICES; FERROELECTRICITY; MICROSTRUCTURE; POLARIZATION; STRONTIUM COMPOUNDS; THREE DIMENSIONAL; X RAY DIFFRACTION;

CAPACITORS;

EID: 24144458952     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2010612     Document Type: Article

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