XPS analysis of Pb(Zr0.52Ti0.48)O3 thin film after dry-etching by CHF3 plasma

Applied Surface Science

Volumn 165, Issue 1, 2000, Pages 34-37

  Lin, Yin Yin ^a   Liu, Qin ^b   Tang, Ting Ao ^a   Yao, Xi ^b  

^a FUDAN UNIVERSITY   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; DRY ETCHING; FERROELECTRIC MATERIALS; GAMMA RAYS; LEAD COMPOUNDS; MACHINING; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

LEAD ZIRCONATE TITANATE;

PLASMA ETCHING;

EID: 0034275927     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00316-0     Document Type: Article

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