Piezoelectric and ferroelectric films for microelectronic applications

Materials Science and Engineering: B

Volumn 99, Issue 1-3, 2003, Pages 159-163

  Ren, Tian Ling ^a   Zhao, Hong Jin ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Ferroelectric; Integrated circuits compatible; Microelectronic device; Piezoelectric; Silicon; Thin film

Indexed keywords

DRY ETCHING; MICROACTUATORS; MICROELECTRONICS; MICROSENSORS; SYNTHESIS (CHEMICAL);

PREPARATION METHODS;

FERROELECTRIC THIN FILMS;

EID: 0038715769     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00466-X     Document Type: Conference Paper

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