Micro-patterning of sol-gel-derived PZT thin film with SAM

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1811-1813

  Suzuki, Hisao ^a   Mori, Takayuki ^a   Fujinami, Tatsuo ^a   Ota, Toshitaka ^b   Fuji, Masayoshi ^b   Takahashi, Minoru ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Chemical solution deposition (CSD); D. Lead zirconate titanate (PZT); Ferroelectricity; Micro patterning; Self assembled monolayer (SAM); Thin films

Indexed keywords

CHEMICAL SOLUTION DEPOSITION (CSD); LEAD ZIRCONATE TITANATE (PZT); MICRO PATTERING; MICRO-PATTERNING;

DIELECTRIC MATERIALS; ELECTRON BEAM LITHOGRAPHY; FERROELECTRICITY; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SELF ASSEMBLY; THIN FILMS;

SOL-GELS;

EID: 4344626093     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.113     Document Type: Conference Paper

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