High quality ferroelectric capacitor for feram applications

Integrated Ferroelectrics

Volumn 46, Issue , 2002, Pages 47-53

  Ren, Tian Ling ^a   Zhang, Lin Tao ^a   Wang, Xiao Ning ^a   Wei, Chao Gang ^a   Liu, Jian She ^a   Liu, L I Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Capacitor; FeRAM; Ferroelectric thin film; PZT; Sol gel

Indexed keywords

CERAMIC CAPACITORS; FERROELECTRIC DEVICES; LEAKAGE CURRENTS; PERMITTIVITY; POLARIZATION; SEMICONDUCTING LEAD COMPOUNDS; SILICON WAFERS; SOL-GELS; TITANIUM COMPOUNDS; ZIRCON;

COERCIVE FIELDS; FERROELECTRIC CAPACITOR; LEAD ZIRCONATE TITANATE (PZT);

FERROELECTRIC THIN FILMS;

EID: 33645497962     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/713718243     Document Type: Article

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