Ferroelectric properties of wet-chemical patterned Pb Zr0.52 Ti0.48 O3 films

Applied Physics Letters

Volumn 86, Issue 7, 2005, Pages 1-3

  Ezhilvalavan, S ^a   Samper, Victor D ^a  

^a INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD ZIRCONATE TITANATE (PZT); PHOTORESIST MASKS; POLARIZATION LOSS; WET-ETCH RATIO;

ATOMIC FORCE MICROSCOPY; ELECTROMAGNETIC WAVE POLARIZATION; ENERGY DISPERSIVE SPECTROSCOPY; ETCHING; FERROELECTRICITY; LEAD COMPOUNDS; PHOTOLITHOGRAPHY; X RAY ANALYSIS;

FERROELECTRIC THIN FILMS;

EID: 17044423395     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1864234     Document Type: Article

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