Modeling, simulation, and testing of the mechanical dynamics of an RF MEMS switch

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 237-240

  Massad, Jordan E ^b   Sumali, Hartono ^b   Epp, David S ^b   Dyck, Christopher W ^a,b  

^a IEEE

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTRIC SWITCHES; ELECTROSTATICS; MATHEMATICAL MODELS; MECHANICAL ENGINEERING; MODAL ANALYSIS; SPRINGS (COMPONENTS); VELOCIMETERS;

DOPPLER VELOCIMETERS; ELECTROSTATIC ACTUATION; MECHANICAL MOTION; RADIO FREQUENCY MICRO ELECTROMECHANICAL SYSTEMS (RF MEMS) SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 33645989241     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.77     Document Type: Conference Paper

References (7)

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