A novel method to avoid sticking of surface-micromachined structures

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 659-662

  Kozlowski, F ^a   Lindmair, N ^a   Scheiter, Th ^b   Hierold, C ^b   Lang, W ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

^b SIEMENS AG   (Germany)

Author keywords

Sticking; Surface micromachining

Indexed keywords

EID: 0000033833     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80033-7     Document Type: Article

References (15)

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