Recovery of stiction-failed MEMS structures using laser-induced stress waves

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 696-700

  Gupta, Vijay ^a   Snow, Richard ^a   Wu, Ming C ^a   Jain, Amit ^a   Tsai, Jui Che ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CANTILEVER BEAMS; COMPRESSIVE STRESS; HEATING; LASER BEAM EFFECTS; MECHANICAL TESTING; NEODYMIUM LASERS; SILICON; STICTION; SURFACES;

LASER ENERGY; LASER FLUENCE; LASER HEATING; LASER INDUCED STRESS WAVES; STICTION RELEASE;

MICROELECTROMECHANICAL DEVICES;

EID: 4344689085     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832185     Document Type: Article

References (20)

1. B. P. Gogoi and C. H. Mastrangelo, "Adhesion release and yield enhancement of microstructures using pulsed Lorentz forces," J. Microelectromech. Syst., vol. 4, pp. 185-192, 1995.
2. V. Kaajakari, S. H. Kan, L. J. Lin, A. Lal, and S. Rodgers, "Ultrasonic actuation for MEMS dormancy-related stiction reduction," Proc. SPIE, vol. 4180, pp. 60-65, 2000.
3. C. J. Kim, J. Kim, and B. Sridharan, "Comparative evaluation of drying techniques for surface micromachining," Sensors and Actuators A: Physical, vol. 64, pp. 17-26, 1998.
4. N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, and M. Elwenspoek, "Stiction in surface micromachining," J. Micromech. Microeng., vol. 6, pp. 385-397, 1996.
5. C. H. Mastrangelo, "Adhesion-related failure mechanisms in micromechanical devices," Tribology Lett., vol. 3, pp. 223-238, 1997.
6. R. Maboudian and R. T. Howe, "Critical review: Adhesion in surface micro-mechanicalstructures," J. Vac. Sci. Technol., vol. B 15, pp. 1-20, 1997.
7. G. T. Mulhern, D. S. Soane, and R. T. Howe, "Supercritical carbon dioxide drying of microstructures," in Proc. Transducers '93, 7th Int. Conf. Solid-State Sensors and Actautors, Yokohama, Japan, 1993, pp. 296-299.
8. H. Guckel, J. J. Sniegowski, T. R. Christensen, and R. Raissi, "The application of fine-grained tensile polysilicon to mechanically resonant transducers," Sens. Actuators, vol. A21, pp. 346-351, 1990.
9. T. Abe, W. C. Messner, and M. L. Reed, "Effective methods to prevent stiction during post-release-etch processing," J. MEMS, vol. 4, pp. 66-75, 1995.
10. M. R. Houston, R. Maboudian, and R. T. Howe, "Self-assembled monolayer films as durable anti-stiction coatings for polysilicon microstructures," in Proc. Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 1996, pp. 42-47.
11. W. R. Ashurst, C. Yau, C. Carraro, C. Lee, G. J. Kluth, R. T. Howe, and R. Maboudian, "Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS," Sens. Actuators, vol. A91, pp. 239-248, 2001.
12. W. R. Ashurst, C. Yau, C. Carraro, R. Maboudian, and M. T. Dugger, "Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: A comparison to the octadecyltrichlosilane self assembled monolayer," J. Microelectromech. Syst., vol. 10, pp. 41-49, 2001.
13. J. Rogers and L. Phinney, "Nanosecond laser repair of adhered MEMS structures," ASME J. Heat Transfer, vol. 124, no. 2, pp. 394-396, 2002.
14. L. M. Phinney and J. W. Rogers, "Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers," J. Adhes. Sci. Tech., vol. 17, no. 4, pp. 603-622, 2003.
15. L. M. Phinney, "Process yields for laser repair of aged, stiction-failed, MEMS devices," J. Microelectromech. Syst., vol. 10, pp. 280-285, June 2001.
16. J. Yuan and V. Gupta, "Measurement of interface strength by the modified laser spallation technique. I. Experiment and simulation of the spallation process," J. Appl. Phys., vol. 74, no. 4, pp. 2388-2396, 1993.
17. V. Gupta and J. Yuan, "Measurement of interface strength by the modified laser spallation technique. II. Applications to metal/ceramic interfaces," J. Appl. Phys., vol. 74, no. 4, pp. 2397-2404, 1993.
18. J. Yuan, V. Gupta, and A. Pronin, "Measurement of interface strength by the modified laser spallation technique. III. Experimental optimization of the stress pulse," J. Appl. Phys., vol. 74, no. 4, pp. 2405-2410, 1993.
19. A. N. Pronin and V. Gupta, "Measurement of thin film interface toughness by laser-generated stress pulses," J. Mech. Phys. Solids, vol. 46, no. 3, pp. 389-389, 1998.
20. V. Gupta, J. Yuan, and A. N. Pronin, "Recent developments in the laser spallation technique to measure the interface strength and its relationship to interface toughness with applications to metal/ceramic, ceramic-ceramic and ceramic-polymer interfaces," J. Adhes. Sci. Tech., vol. 8, no. 6, pp. 713-747, 1994.