Performance advances in interferometric optical profilers for imaging and testing

Journal of Optics A: Pure and Applied Optics

Volumn 10, Issue 6, 2008, Pages

  Schmit, J ^a   Reed, J ^b   Novak, E ^a   Gimzewski, J K ^b  

^a VEECO INSTRUMENTS INC   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Cell; Dynamic motion; Film thickness; Phase shifting interferometry; Shape; Through media measurement; White light measurement

Indexed keywords

PHASE SHIFTING INTERFEROMETRY; THROUGH MEDIA MEASUREMENT; WHITE LIGHT MEASUREMENT;

FILM THICKNESS; IMAGING SYSTEMS; MICROELECTROMECHANICAL DEVICES; PHASE SHIFT;

INTERFEROMETRY;

EID: 44449151651     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/10/6/064001     Document Type: Article

References (41)

1. Creath K and Schmit J 2005 Phase shifting interferometry Encyclopedia of Modern Optics ed B D Guenther (Oxford: Elsevier) pp364-74
2. Hariharan P, Oreb B F and Eiju T 1987 Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm Appl. Opt. 26 2504-5
3. Takeda M, Ina H and Kobayashi S 1982 Fourier transform method of fringe pattern analysis for computer based topography and interferometry J. Opt. Soc. Am. 72 156-60
4. Schmit J, Creath K and Kujawinska M 1992 Spatial and temporal phase-measurement techniques: a comparison of major error sources in one-dimension Proc. SPIE 1755 202-11
5. Lee B S and Strand T C 1990 Profilometry with a coherence scanning microscope Appl. Opt. 29 3784-8
6. Dresdel T, Häusler G and Venzke H 1992 Three dimensional sensing of rough surfaces with the coherence radar Appl. Opt. 7 919-25
7. Caber P J 1993 Interferometric profiler for rough surfaces Appl. Opt. 32 3438-41
8. de Groot P and Deck L 1995 Surface profiling by analysis of white-light interferograms in the spatial frequency domain J. Mod. Opt. 42 389-401
9. Schmit J 2005 White light interferometry Encyclopedia of Modern Optics ed B D Guenther (Oxford: Elsevier) pp375-87
10. de Groot P and Deck L 1993 Three dimensional imaging by sub-Nyquist sampling of white-light interferograms Opt. Lett. 18 1462-4
11. Hirabayashi A, Ogawa H and Kitagawa K 2001 Fast surface profiler by white light interferometry using a new algorithm, the SEST algorithm Proc. SPIE 4451 356-67
12. Schmit J 2003 High speed measurements using optical profiler Proc. SPIE 5144 46-56
13. Häusler G and Neumann J 1992 Coherence radar-an accurate 3D sensors for rough surfaces Proc. SPIE 1822 200-5
14. Cohen D, Caber P J and Brophy C 1992 Rough surface profiler and method US Patent Specification 5,133,601
15. Sandoz P, Devillers R and Plata A 1997 Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry J. Mod. Opt. 44 519-34
16. Harasaki A, Schmit J and Wyant J C 2000 Improved vertical scanning interferometry Appl. Opt. 39 2107-15
17. de Groot P et al 2002 Determination of fringe order in white light interference microscopy Appl. Opt. 41 4571-8
18. Novak E and Schurig M 2004 Dynamic MEMS measuring interferometric microscope Proc. SPIE 5180 228-35
19. de Groot P 2006 Stroboscopic white-light interference microscopy Appl. Opt. 45 5840-4
20. Bosseboeuf A and Petitgrand S 2003 Application of microscopic interferometry techniques in the MEMS field Proc. SPIE 5145 1-6
21. Petitgrand S and Besseboeuf A 2004 Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution J. Micromech. Microeng. 14 S97-101
22. Gimzewski J K et al 1994 Observation of a chemical-reaction using a micromechanical sensor Chem. Phys. Lett. 217 589-94
23. Ekinci K L, Yang Y T and Roukes M L 2004 Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems J. Appl. Phys. 95 2682-9
24. Reed J, Wilkinson P, Schmit J, Klug W and Gimzewski J K 2006 Observation of nanoscale dynamics in cantilever sensor arrays Nanotechnology 17 3873-9
25. Han S 2006 Interferometric testing through transmissive media Proc. SPIE 6293 629305
26. Heine L M and Oden P I 2006 Non-destructive structural homogeneity of MOEMS arrays: applications of a through-transmissive-media interferometer on a digital mirror device-spatial light modulator Proc. SPIE 6293 62930C
27. Reed J et al 2006 Applications of imaging interferometry Proc. SPIE 6293 629301
28. Marquet P, Rappaz B, Colomb T, Charriere F, Kuhn J, Emery Y, Cuche E, Depeursinge C and Magistretti P 2006 Digital holographic microscopy, a new optical imaging technique to investigate cellular dynamics Proc. SPIE 6191 61910U-5
29. Popescu G, Ikeda T, Dasari R R and Feld M S 2006 Diffraction phase microscopy for quantifying cell structure and dynamics Opt. Lett. 31 775-7
30. Fluorny P A, McClure R W and Wyntjes G 1972 White-light interferometric thickness gauge Appl. Opt. 11 1907-15
31. Tsuruta T and Ichihara Y 1975 Accurate measurement of lens thickness by using white light fringes Japanese J. Appl. Phys. Suppl. 14 369-72
32. Hariharan P and Roy M 1996 Interferometric surface profiling with white light: effect of surface films J. Mod. Opt. 43 1797-800
33. Roy M et al 2005 White light interference microscopy: effects of multiple reflections within a surface film Opt. Express 13 164-70
34. Kim S W and Kim G H 1999 Thickness-profile measurement of transparent thin-film layers by white light scanning interferometry Appl. Opt. 38 5968-73
35. de Groot P and de Lega X C 2004 Signal modeling for low-coherence height-scanning interference microscopy Appl. Opt. 43 4821-30
36. Mansfield D 2006 The distorted helix: thin film extraction from scanning white light interferometry Proc. SPIE 6186 23
37. Harasaki A, Schmit J and Wyant J C 2001 Offset envelope position due to phase change on reflection Appl. Opt. 40 2102-6
38. Matsui K and Kawata S 1992 Fringe scanning white-light microscope for surface profile measurement and material identification Proc. SPIE 1720 124
39. Binnig G, Quate C F and Gerber C 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
40. Pelling A, Sehati S, Gralla E B, Valentine J S and Gimzewski JK 2004 Local nanomechanical motion of the cell wall of Saccharomyces cerevisiae Science 305 1147-50
41. Van Vliet K, Bao G and Suresh S 2003 The biomechanics toolbox: experimental approaches for living cells and biomolecules Acta Mater. 51 5881-905