Dynamic MEMS measuring interferometric microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5180, Issue , 2003, Pages 228-235

  Novak, Erik ^a   Schurig, Michael ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

Dynamic measurement; MEMS; Optical profiler; Strobed interferometer; White light interferometry

Indexed keywords

INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; NATURAL FREQUENCIES; OPTICAL VARIABLES MEASUREMENT; SPATIAL VARIABLES MEASUREMENT;

DYNAMIC MEASUREMENT; INTERFEROMETRIC MICROSCOPE; OPTICAL PROFILER; WHILE LIGHT INTERFEROMETRY;

MICROSCOPES;

EID: 1842608748     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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