Offset of coherent envelope position due to phase change on reflection

Applied Optics

Volumn 40, Issue 13, 2001, Pages 2102-2106

  Harasaki, Akiko ^a,b,c   Schmit, Joanna ^a,b   Wyant, James C ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b Veeco Metrology   (United States)

^c JAPAN DEFENSE AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; INTERFEROMETRY; SCANNING;

VERTICAL SCANNING INTERFEROMETRY (VSI);

LIGHT REFLECTION;

EID: 0000546959     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.002102     Document Type: Article

References (9)

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