High speed measurements using optical profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 46-56

  Schmit, Joanna ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

High speed measurement; Low coherence interferometry; White light interferometry

Indexed keywords

ALGORITHMS; BIREFRINGENCE; CAMERAS; INTERFEROMETRY; LIGHT REFLECTION; OPTICAL BEAM SPLITTERS; OPTICAL DEVICES; SCANNING; SPURIOUS SIGNAL NOISE;

HIGH SPEED MEASUREMENT; LIGHT FRINGE ANALYSIS; LIGHT INTERFEROMETRIC MEASUREMENT; OPTICAL PROFILER; WHITE LIGHT INTERFEROMETRY;

OPTICAL VARIABLES MEASUREMENT;

EID: 0141497363     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.501035     Document Type: Conference Paper

References (16)

1. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, pp. 3784-3788, 1990.
2. G. S. Kino and S. S. C. Chim, "Mirau correlation microscope," Appl. Opt. 29 (26) pp. 3438-3783, 1990.
3. T. Dresdel, G. Häusler, and H. Venzke, "Three dimensional sensing of rough surfaces with the coherence radar," Appl. Opt. 7, pp. 919-925, 1992.
4. P.J. Caber, "Interferometric profiler for rough surfaces," Appl. Opt. 32, pp. 3438-3441, 1993.
5. R. Windecker, P. Haible, and H. J. Tiziani, "Fast coherence scanning interferometry for smooth, rough and spherical surfaces," J. Mod. Opt. 42, pp. 2059-2069, 1995.
6. K. Creath, "Sampling considerations in White light interferometry," in Fringe'97: Proceedings of the 3rd International Workshop on Automatic Processing of Fringe Patterns, held in Bremen, September 15-17, 1997, W. Jüptner and W. Osten, eds. pp. 52-59, Akademie-Verlag, (Berlin), 1997.
7. K. G. Larkin, "Effective nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Am. A. 13, pp. 832-843, 1996.
8. J. Schmit and K. Creath, "Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry," App. Opt. 34 (19), pp. 3610-3619, 1995.
9. P. de Groot and L. Deck, "Three dimensional imaging by sub-Nyquist sampling of white-light interferograms," Opt. Let. 18 (17), pp. 1462-1464, 1993.
10. A. Hirabayashi, H. Ogawa, and K. Kitagawa, "Fast surface profiler by white light interferometry using a new algorithm, the SEST algorithm," in Optical Manufacturing and Testing IV, H.P. Stahl, ed. SPIE Proceedings, vol. 4451, pp. 356-367, 2001.
11. K. G. Larkin, "Efficient demodulator for bandpass sampled AM signal," Electronic Letters, 32(2), pp. 101-102, 2001.
12. M. Fleisher, R. Windecker and H. Tiziani, "Theoretical limits of scanning white light interferometry signal evaluation algorithms," Appl. Opt. 40 (17), pp. 2815-2820, 2001.
13. J. E. Greivenkamp and J. H. Bruning, "Phase shifting interferometers" chapt. 14th in Optical Shop Testing, D. Malacara (ed.), John Wiley & Sons, Inc. 2nd edition, pp. 517-518, 550, 1992.
14. J. Schmit, A. Olszak, "Some challenges in white light phase shifting interferometry," in Interferometry XI: Techniques and Analysis, K. Creath and J. Schmit, eds, Proceedings, SPIE 4777, 118-127, July 7-11, 2002.
15. G. Olszak, J. Schmit, "High stability white light interferometry with reference signal for real time correction of scanning errors", Opt. Eng. 42 (1), 54-59, 2003.
16. C. Farrell, "New algorithms for high accuracy for phase shifting algorithms," PhD thesis, University of Aberdeen, Nov. 1993.