Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution

Journal of Micromechanics and Microengineering

Volumn 14, Issue 9, 2004, Pages

  Petitgrand, Sylvain ^a,b   Bosseboeuf, Alain ^a  

^a UNIV PARIS SUD   (France)

^b Fogale Nanotech   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DEMODULATION; FREQUENCIES; INTERFEROMETRY; MAPPING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OPTICAL MICROSCOPY; VIBRATION CONTROL;

IN-PLANE VIBRATIONS; LIGHT PULSE; MICRODEVICES; PHASE MAPS;

MICROELECTROMECHANICAL DEVICES;

EID: 4544297882     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/9/017     Document Type: Conference Paper

References (18)

1. Bosseboeuf A and Petitgrand S 2003 Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends J. Micromech. Microeng. 13 S23-S33
2. Bosseboeuf A and Petitgrand S 2003 Application of microscopic interferometry techniques in the MEMS field Proc. SPIE 5145 1-16
3. Rembe C, Kant R and Muller R S 2001 Optical measurement methods to study dynamic behaviour in MEMS Proc. SPIE 4400 127-37
4. Aswendt P 2003 Micromotion analysis by deep-UV speckle interferometry Proc. SPIE 5145 17-22
5. Davis C Q and Freeman D M 1998 Using a light microscope to measure motions with nanometer accuracy Opt. Eng. 37 1299-304
6. Freeman D M 2001 Measuring motions of MEMS MRS Bull. 4 305-6
7. Hemmers W, Mermelstein M S and Freeman D M 1999 Nanometer resolution of three-dimensional motions using video interference microscopy Proc. IEEE MEMS'99 (Orlando, Florida) pp 302-8
8. La Vigne G F and Miller S L 1998 A performance analysis system for MEMS using automated imaging methods Proc. IEEE Int. Test Conf. (Washington DC, USA) pp 442-7
9. Volpicelli A M, Deutsch E R and Senturia S D 1999 Use of computer microvision to automate electrostatic material property measurement procedures Proc. Transducers '99 pp 920-3
10. Smith N F, Eaton W P, Tanner D M and Allen J J 1999 Development of characterization tools for reliability testing of MicroElectroMechnical System actuators Proc. SPIE 3880 156-64
11. Muhlstein C L, Brown S B and Ritchie R O 2001 High-cycle fatigue and durability of polycristalline silicon thin films in ambient air Sensors Actuators A 94 177-88
12. Hafiane A, Petitgrand S, Gigan O, Bouchafa S and Bosseboeuf A 2003 Study of sub-pixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy Proc. SPIE 5145 169-79
13. Cretin B, Serio B and Vairac P 2003 In-plane optical measurements of vibrations of MEMS : gradient methods using interferometry and image processing Proc. SPIE 5145 161-8
14. http://www.fogale.fr
15. Petitgrand S, Yahiaoui R, Danaie K, Bosseboeuf A and Gilles J-P 2001 3D measurement of micromechanical devices vibration mode shapes by stroboscopic microscopic interferometry Opt. Lasers Eng. 36 77-101
16. Boutry M, Bosseboeuf A and Coffignal G 1996 Characterization of residual stress in metallic films on silicon with micromechanical devices Proc. SPIE 2879 126-43
17. Petitgrand S and Bosseboeuf A 2003 Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination Proc. SPIE 5145 33-44
18. Blevins R D 1979 Formulas for Natural Frequency and Mode Shape (Malabar, FL: Krieger)