Fast surface profiler by white-light interferometry using a new algorithm, the SEST algorithm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 356-367

  Akira, Hirabayashi ^a   Hidemitsu, Ogawa ^a   Katsuichi, Kitagawa ^a  

^a YAMAGUCHI UNIVERSITY   (Japan)

Author keywords

Bandpass signal; Interference fringe; Sampling theorem; Surface profiler; Surface profiling; The SEST algorithm; White light interferometry

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; INTERFEROMETERS; LIGHT INTERFERENCE; MATHEMATICAL MODELS; MOIRE FRINGES; OPTICAL BEAM SPLITTERS; OPTICAL FILTERS; SCANNING; VIDEO CAMERAS;

BANDPASS SIGNAL; INTERFERENCE FRINGE; SQUARE ENVELOPE FUNCTION ESTIMATION BY SAMPLING THEORY; SURFACE PROFILER; WHITE-LIGHT INTERFEROMETRY;

INTERFEROMETRY;

EID: 0035760693     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453634     Document Type: Conference Paper

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