Determination of fringe order in white-light interference microscopy

Applied Optics

Volumn 41, Issue 22, 2002, Pages 4571-4578

  De Groot, Peter ^a   de Lega, Xavier Colonna ^a   Kramer, Jim ^a   Turzhitsky, Michael ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ALGORITHMS; COHERENT LIGHT; DIFFRACTION; ELECTROMAGNETIC DISPERSION; FREQUENCY DOMAIN ANALYSIS; MICROSCOPIC EXAMINATION; PHASE SHIFT; SIGNAL DISTORTION; SURFACE PROPERTIES; TEXTURES;

WHITE-LIGHT INTERFERENCE;

LIGHT INTERFERENCE;

EID: 0036684543     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.004571     Document Type: Article

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