SCOPUS 정보 검색 플랫폼

Optics Express

Volumn 13, Issue 1, 2005, Pages 164-170

White-light interference microscopy: Effects of multiple reflections within a surface film

(5) Roy, Maitreyee a Cooper, Ian a Moore, Peter a Sheppard, Colin J R b Hariharan, Parameswaran a

a UNIVERSITY OF SYDNEY (Australia)

b NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DIELECTRIC FILMS; INTERFEROMETRY; MICROSCOPIC EXAMINATION; MONOCHROMATORS; PROFILOMETRY; REFLECTION; REFRACTIVE INDEX; SURFACE ROUGHNESS; THIN FILMS;

MICHELSON INTERFEROMETERS; NONCONTACT OPTICAL PROFILING; SURFACE PROFILING; WHITE LIGHT INTERFERENCE MICROSCOPY; WHITE-LIGHT INTERFEROMETRY (WLI);

LIGHT INTERFERENCE;

EID: 13544249878 PISSN: 10944087 EISSN: 10944087 Source Type: Journal
DOI: 10.1364/OPEX.13.000164 Document Type: Article

Times cited : (28)

References (8)

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2
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- (2004) Optics Express , vol.12 , pp. 2512-2516
- Roy, M.¹ Sheppard, C.J.R.² Hariharan, P.³

3
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- Interferometric surface profiling with white-light: Effects of surface films
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- (1996) J. Mod. Opt. , vol.43 , pp. 1797-1800
- Hariharan, P.¹ Roy, M.²

4
- 0000188027
- Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry
- S-W. Kim and G.H. Kim, "Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968-5973 (1999).
- (1999) Appl. Opt. , vol.38 , pp. 5968-5973
- Kim, S.-W.¹ Kim, G.H.²

5
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- Signal modeling for low-coherence height-scanning interferometric microscopy
- P. de Groot and X. C. de Lega, "Signal modeling for low-coherence height-scanning interferometric microscopy," Appl. Opt., 43, 4821-4830 (2004).
- (2004) Appl. Opt. , vol.43 , pp. 4821-4830
- De Groot, P.¹ De Lega, X.C.²

6
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- Academic, San Diego
- P. Hariharan, Optical Interferometry (Academic, San Diego, 2003).
- (2003) Optical Interferometry
- Hariharan, P.¹

7
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- Longmans, Green & Co Ltd, London
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8
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- Thickness measurements of silicon dioxide films over small geometries
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.