Interferometric surface profiling with white light: Effects of surface films

Journal of Modern Optics

Volumn 43, Issue 9, 1996, Pages 1797-1800

  Hariharan, P ^a   Roy, Maitreyee ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRIC SURFACE PROFILING; SURFACE FILMS; WHITE LIGHT;

ERROR DETECTION; INTERFEROMETRY; REFLECTION; SURFACE PHENOMENA; THIN FILMS;

LIGHT POLARIZATION;

EID: 0030242677     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500349608232850     Document Type: Article

References (5)

1. Davidson, M., Kaufman, K., Mazor, I., and Cohen, F., 1987. Integrated Circuit Metrology, Inspection and Process Control, Vol. 775, 233Bellingham, WA:SPIE. Proceedings of the SPIE
2. Kino, G. S., and Chim, S. S. C., 1990. Appl. Optics, 29:3775
3. Lee, B. S., and Strand, T. C., 1990. Appl. Optics, 29:3784
4. Wolf, E., 1981. Optics Commun., 38:3
5. Born, M., and Wolf, E., 1980. Principles of Optics, sixth edition, 321Oxford:Pergamon.