The distorted helix: Thin film extraction from scanning white light interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Mansfield, Daniel ^a  

^a Taylor and Hobson Ltd   (United Kingdom)

Author keywords

PCOR; Step height; SWLI; Thin films

Indexed keywords

LIGHT INTERFERENCE; MULTILAYERS; OPTICAL RESOLVING POWER; OPTIMIZATION; REFRACTIVE INDEX; SURFACE TOPOGRAPHY; THIN FILMS;

OPTICAL ADMITTANCES; PCOR; STEP-HEIGHT; SWLI;

INTERFEROMETRY;

EID: 33746758922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.664036     Document Type: Conference Paper

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