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Volumn 45, Issue 23, 2006, Pages 5840-5844

Stroboscopic white-light interference microscopy

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; ERROR ANALYSIS; INTERFEROMETRY; LIGHT INTERFERENCE; LIGHT SOURCES; MONOCHROMATORS;

EID: 33749861586     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.005840     Document Type: Article
Times cited : (26)

References (11)
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    • Kwon, O.Y.1    Shough, D.M.2    Williams, R.A.3
  • 3
    • 84894010426 scopus 로고
    • "Apparatus for measuring fine periodic vibration displacement," Japanese patent 3150239
    • T. Eguchi and S. Okuma, "Apparatus for measuring fine periodic vibration displacement," Japanese patent 3150239 (1995).
    • (1995)
    • Eguchi, T.1    Okuma, S.2
  • 4
    • 0040807787 scopus 로고
    • Fringe scanning interferometric imaging of small vibration using pulsed laser diode
    • K. Nakano, H. Yoshida, K. Hane, S. Okuma, and T. Eguchi, "Fringe scanning interferometric imaging of small vibration using pulsed laser diode," Trans. SICE 31, 454-460 (1995).
    • (1995) Trans. SICE , vol.31 , pp. 454-460
    • Nakano, K.1    Yoshida, H.2    Hane, K.3    Okuma, S.4    Eguchi, T.5
  • 5
    • 84893992376 scopus 로고    scopus 로고
    • "Interferometric system for precision imaging of vibrating structures," U.S. patent 6,291,145
    • R. Gutierrez, K. Shcheglov, and T. Tang, "Interferometric system for precision imaging of vibrating structures," U.S. patent 6,291,145 (2001).
    • (2001)
    • Gutierrez, R.1    Shcheglov, K.2    Tang, T.3
  • 6
    • 0038735385 scopus 로고    scopus 로고
    • Template-based software for accurate MEMS characterization
    • E. Novak, M. B. Krell, and T. Browne, Template-based software for accurate MEMS characterization," in Proc. SPIE 4980, 75-80 (2003).
    • (2003) Proc. SPIE , vol.4980 , pp. 75-80
    • Novak, E.1    Krell, M.B.2    Browne, T.3
  • 7
    • 1342331055 scopus 로고    scopus 로고
    • Application of microscopic interferometry techniques in the MEMS field
    • A. Bosseboeuf and S. Petigrand, "Application of microscopic interferometry techniques in the MEMS field," in Proc. SPIE 5145, 1-16 (2003).
    • (2003) Proc. SPIE , vol.5145 , pp. 1-16
    • Bosseboeuf, A.1    Petigrand, S.2
  • 8
    • 33749839362 scopus 로고    scopus 로고
    • Microsystems engineering: Metrology and inspection III
    • C. Gorecki, ed.
    • C. Gorecki, ed., "Microsystems engineering: metrology and inspection III," in Proc. SPIE 5145 (2003).
    • (2003) Proc. SPIE , vol.5145
  • 9
    • 4544294406 scopus 로고    scopus 로고
    • Signal modeling for low coherence height-scanning interference microscopy
    • P. de Groot and X. Colonna de Lega, "Signal modeling for low coherence height-scanning interference microscopy," Appl. Opt. 43, 4821-4830 (2004).
    • (2004) Appl. Opt. , vol.43 , pp. 4821-4830
    • De Groot, P.1    De Colonna Lega, X.2
  • 10
    • 15744364608 scopus 로고    scopus 로고
    • A white-light profiling algorithm adopting the multi-wavelength interferometric technique
    • H.-C. Hsu, C.-H. Tung, C.-F. Kao, and C. C. Chang, "A white-light profiling algorithm adopting the multi-wavelength interferometric technique," in Proc. SPIE 5531, 244-249 (2004).
    • (2004) Proc. SPIE , vol.5531 , pp. 244-249
    • Hsu, H.-C.1    Tung, C.-H.2    Kao, C.-F.3    Chang, C.C.4
  • 11
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    • Three-dimensional characterization of MEMS devices
    • Cambridge, U.K.
    • E. Novak and F. Pasop, "Three-dimensional characterization of MEMS devices," in IMAPS Conference Microtech (Cambridge, U.K., 2004).
    • (2004) IMAPS Conference Microtech
    • Novak, E.1    Pasop, F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.