Observation of nanoscale dynamics in cantilever sensor arrays

Nanotechnology

Volumn 17, Issue 15, 2006, Pages 3873-3879

  Reed, Jason ^a   Wilkinson, Paul ^a   Schmit, Joanna ^b   Klug, William ^a   Gimzewski, J K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Veeco Metrology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; ELECTRIC EXCITATION; FINITE ELEMENT METHOD; INTERFEROMETRY; NANOTECHNOLOGY; RESONANCE; THERMAL EFFECTS; TRANSDUCERS;

BIOCHEMICAL STIMULI; SILICON MICRO CANTILEVERS; STATIC BENDING; STROBED INTERFEROMETRIC MICROSCOPY;

ARRAYS;

EID: 33748901480     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/15/044     Document Type: Article

References (34)

1. Binnig G, Quate C F and Gerber C 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
2. Giessibl F J 1995 Atomic-resolution of the silicon (111)-(7 × 7) surface by atomic-force microscopy Science 267 68-71
3. Gimzewski J K, Gerber C, Meyer E and Schlittler R R 1994 Observation of a chemical-reaction using a micromechanical sensor Chem. Phys. Lett. 217 589-94
4. Barnes J R, Stephenson R J, Welland M E, Gerber C and Gimzewski J K 1994 Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device Nature 372 79-81
5. Ekinci K L, Yang Y T and Roukes M L 2004 Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems J. Appl. Phys. 95 2682-9
6. Ekinci K L, Huang X M H and Roukes M L 2004 Ultrasensitive nanoelectromechanical mass detection Appl. Phys. Lett. 84 4469-71
7. Berger R, Delamarche E, Lang H P, Gerber C, Gimzewski J K, Meyer E and Guntherodt H J 1997 Surface stress in the self-assembly of alkanethiols on gold Science 276 2021-4
8. Mamin H J, Budakian R, Chui B W and Rugar D 2005 Magnetic resonance force microscopy of nuclear spins: Detection and manipulation of statistical polarization Phys. Rev. B 72 (2)
9. Rugar D, Budakian R, Mamin H J and Chui B W 2004 Single spin detection by magnetic resonance force microscopy Nature 430 329-32
10. Lang H P et al 1998 A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors Appl. Phys. A 66 S61-4
11. Battiston F M, Ramseyer J P, Lang H P, Baller M K, Gerber C, Gimzewski J K, Meyer E and Guntherodt H J 2001 A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout Sensors Actuators B 77 122-31
12. Fritz J, Baller M K, Lang H P, Rothuizen H, Vettiger P, Meyer E, Guntherodt H J, Gerber C and Gimzewski JK 2000 Translating biomolecular recognition into nanomechanics Science 288 316-8
13. Backmann N, Zahnd C, Huber F, Bietsch A, Pluckthun A, Lang H P, Guntherodt H J, Hegner M and Gerber C 2005 A label-free immunosensor array using single-chain antibody fragments Proc. Natl Acad. Sci. USA 102 14587-92
14. Baller M K et al 2000 A cantilever array-based artificial nose Ultramicroscopy 82 1-9
15. Tamayo J, Humphris A D L, Malloy A M and Miles M J 2001 Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor Ultramicroscopy 86 167-73
16. Tamayo J, Humphris A D L, Owen R J and Miles M J 2001 High-Q dynamic force microscopy in liquid and its application to living cells Biophys. J. 81 526-37
17. Sahin O, Yaralioglu G, Grow R, Zappe S F, Atalar A, Quate C and Solgaard O 2004 High-resolution imaging of elastic properties using harmonic cantilevers Sensors Actuators A 114 183-90
18. Sahin O, Quate C F, Solgaard O and Atalar A 2004 Resonant harmonic response in tapping-mode atomic force microscopy Phys. Rev. B 69 (16)
19. Dohn S, Sandberg R, Svendsen W and Boisen A 2005 Enhanced functionality of cantilever based mass sensors using higher modes Appl. Phys. Lett. 86 (23)
20. Sharos L B, Raman A, Crittenden S and Reifenberger R 2004 Enhanced mass sensing using torsional and lateral resonances in microcantilevers Appl. Phys. Lett. 84 4638-40
21. Kar A K and George M A 2003 Improved detection of thermally induced higher resonance modes and harmonics of a microcantilever J. Appl. Phys. 94 4626-31
22. Pfeiffer O, Loppacher C, Wattinger C, Bammerlin M, Gysin U, Guggisberg M, Rast S, Bennewitz R, Meyer E and Guntherodt H J 2000 Using higher flexural modes in non-contact force microscopy Appl. Surf. Sci. 157 337-42
23. Caron A, Rabe U, Reinstaedtler M, Turner J and Arnold W 2004 Imaging using lateral bending modes of atomic force microscope cantilevers Appl. Phys. Lett. 85 6398-400
24. Reinstaedtler M, Rabe U, Scherer V, Turner J A and Arnold W 2003 Imaging of flexural and torsional resonance modes of atomic force microscopy cantilevers using optical interferometry Surf. Sci. 532 1152-8
25. Petitgrand S, Yahiaoui R, Danaie K, Bosseboeuf A and Gilles JP 2001 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope Opt. Lasers Eng. 36 77-101
26. Arntz Y, Seelig J D, Lang H P, Zhang J, Hunziker P, Ramseyer J P, Meyer E, Hegner M and Gerber C 2003 Label-free protein assay based on a nanomechanical cantilever array Nanotechnology 14 86-90
27. McKendry R et al 2002 Multiple label-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array Proc. Natl Acad. Sci. USA 99 9783-8
28. Olszak A G, Schmit J and Heaton M G 2001 Interferometric approaches each have advantages Laser Focus World 37 93-5
29. Aziz D J 1998 Interferometric measurement of surface roughness in engine cylinder walls Opt. Eng. 37 1429-34
30. Madou M 2002 Silicon as a mechanical element in MEMS Fundamentals of Microfabrication (Boca Raton, FL: CRC Press) pp183-95
31. Sader J E, Chon J W M and Mulvaney P 1999 Calibration of rectangular atomic force microscope cantilevers Rev. Sci. Instrum. 70 3967-9
32. Khuri-Yakob P 2005 personal communication
33. McFarland A W, Poggi M A, Bottomley L A and Colton J S 2005 Characterization of microcantilevers solely by frequency response acquisition J. Micromech. Microeng. 15 785-91
34. Edwards D 1985 Handbook of Optical Constants of Solids ed E Palick (New York: Academic) pp564-5