Table top nanopatterning with extreme ultraviolet laser illumination

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 721-724

  Capeluto, M G ^a,c   Wachulak, P ^a,b,c   Marconi, M C ^a,b,c   Patel, D ^a,b,c   Menoni, C S ^a,b,c   Rocca, J J ^a,b,c   Iemmi, C ^a,c   Anderson, E H ^a,c,d   Chao, W ^a,c,d   Attwood, D T ^a,c,d,e  

^a Veterinary Dentistry and Oral Surgery   (United States)

^b Department of Mechanical Engineering   (United States)

^c UNIVERSIDAD DE BUENOS AIRES   (Argentina)

^d LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

EUV lasers; Interferometric lithography; Nanopatterning; Table top photolithography

Indexed keywords

LASER INTERFEROMETRY; LITHOGRAPHY; NANOTECHNOLOGY; POLYMETHYL METHACRYLATES; ULTRAVIOLET RADIATION; WAVELENGTH;

EUV LASERS; INTERFEROMETRIC LITHOGRAPHY; NANOPATTERNING; TABLE TOP PHOTOLITHOGRAPHY;

LASERS;

EID: 34247558643     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.018     Document Type: Article

References (14)

1. Naulleau P., Goldberg K.A., Cain J.P., Anderson E.H., Dean K.R., Denham P., Hoef B., and Jackson K.H. IEEE J. Quant. Electron. 42 (2006) 44
2. Golovkina V.N., Nealey P.F., Cerrina F., Taylor J.W., Solak H.H., David C., and Gobrecht J. J. Vac. Sci. Technol. B 22 (2004) 99
3. Solak H.H., He D., Li W., Singh Gasson S., Cerrina F., Sohn B.H., Yang X.M., and Nealey P. Appl. Phys. Lett. 75 (1999) 2328
4. Solak H.H., He D., Li W., and Cerrina F. J. Vac. Sci. Technol. B 17 (1999) 3052
5. Zaidi S.H., and Brueck S.R.J. J. Vac. Sci. Technol. B 11 (1993) 658
6. Solak H.H., and David C. J. Vac. Sci. Technol. B 21 (2003) 2883
7. Savas T.A., Shah S.N., Schattenburg M.L., Carter J.M., and Smith H.I. J. Vac. Sci. Technol. B 13 (1995) 2732
8. Switkes M., Bloomstein T.M., and Rothschild M. Appl. Phys. Lett. 77 (2000) 3149
9. Solak H.H., David C., Gobrecht J., Wang L., and Cerrina F. J. Vac. Sci. Technol. B 20 (2002) 2844
10. Capeluto M.G., Vaschenko G., Grisham M., Marconi M.C., Luduena S., Pietrasanta L., Lu Y., Parkinson B., Menoni C.S., and Rocca J.J. IEEE Trans. Nanotechnol. 5 (2006) 3
11. Benware B., Moreno C., Burd D., and Rocca J.J. Opt. Lett. 22 (1997) 796
12. Fernandez A., and Phillion D.W. Appl. Opt. 37 (1998) 473
13. Solak H.H., David C., and Gobrecht J. J. Vac. Sci. Technol. B 20 (2002) 2844
14. Attwood D. Soft X-ray and Extreme Ultraviolet Radiation, Principles and Applications (2000), Cambridge University Press