Development of residual stress in sol-gel derived Pb (Zr,Ti) O3 films: An experimental study

Journal of Applied Physics

Volumn 103, Issue 8, 2008, Pages

  Corkovic, S ^a   Whatmore, R W ^b   Zhang, Q ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC THIN FILMS; HEAT TREATMENT; LEAD COMPOUNDS; SILICON WAFERS; SOL-GEL PROCESS;

ELASTIC MISMATCH; METAL OXIDES; METAL-ORGANIC GEL; WAFER CURVATURE METHOD;

RESIDUAL STRESSES;

EID: 43049113915     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2890142     Document Type: Article

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