Deposition of self-polarized PZT films by planar multi-target sputtering

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 141-149

  Bruchhaus, Rainer ^a   Pitzer, Dana ^a   Primig, Robert ^a   Wersing, Wolfram ^a   Xu, Yuqing ^a,b  

^a SIEMENS AG   (Germany)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRENGTH; LEAD COMPOUNDS; PERMITTIVITY; PYROELECTRICITY; SPUTTER DEPOSITION; SUBSTRATES; TENSILE STRENGTH; TITANIUM COMPOUNDS;

PLANAR MULTITARGET SPUTTERING TECHNIQUES; PYROELECTRIC INFRARED DETECTOR ARRAYS;

DIELECTRIC FILMS;

EID: 0031334937     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019986     Document Type: Article

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