Residual stresses in Pt bottom electrodes for sol-gel derived lead zirconate titanate thin films

Journal of the European Ceramic Society

Volumn 24, Issue 6, 2004, Pages 1673-1676

  Zhang, Lulu ^a   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Mechanical properties; Pt; PZT; Sol gel processes; X ray methods

Indexed keywords

ANNEALING; ELECTRODES; ETCHING; LEAD COMPOUNDS; RESIDUAL STRESSES; SOL-GELS; THERMAL STRESS; THIN FILMS;

CRYSTALLITE DIMENSIONS;

PLATINUM COMPOUNDS;

RESIDUAL STRESS;

EID: 0942301927     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00408-4     Document Type: Article

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