Preparation and stress evaluation of ferroelectric thin films of PZT based pyroelectric sensors

Ferroelectrics

Volumn 228, Issue 1-4, 1999, Pages 79-89

  Padmini, P ^a   Krawietz, R ^a   Kohler R ^a   Gerlach, G ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Ferroelectric films; Pyroelectric; Raman spectroscopy; Sputtering; Stress

Indexed keywords

DIELECTRIC FILMS; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); LEAD COMPOUNDS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; PYROELECTRICITY; RAMAN SPECTROSCOPY; SENSORS; SILICON WAFERS; STRESS ANALYSIS; THIN FILMS;

LEAD ZIRCONATE TITANATE; PYROELECTRIC SENSORS;

FERROELECTRIC MATERIALS;

EID: 0033341682     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199908226127     Document Type: Article

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