Properties of PZT thin films as a function of in-plane biaxial stress

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 161-165

  Shepard Jr , J F ^a   Trolier McKinstry, S ^a   Hendrickson, Mary A ^a   Zeto, Robert ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE MEASUREMENT; CAPACITORS; COERCIVE FORCE; LEAD COMPOUNDS; POLARIZATION; RESIDUAL STRESSES; SOL-GELS; SPUTTERING; STRESS ANALYSIS; SUBSTRATES; THIN FILMS;

INPLANE BIAXIAL STRESSES; LEAD ZIRCONATE TITANATE;

PIEZOELECTRIC MATERIALS;

EID: 0030370149     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)