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Volumn 594, Issue , 2000, Pages 237-242
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Stress and stress relaxation study of sputtered PZT thin films for microsystems applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COMPRESSIVE STRESS;
LEAD COMPOUNDS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC MATERIALS;
PLATINUM;
SPUTTER DEPOSITION;
STRESS ANALYSIS;
STRESS RELAXATION;
TENSILE STRESS;
THIN FILMS;
TITANIUM;
LEAD ZIRCONATE TITANATE;
DIELECTRIC FILMS;
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EID: 0033652703
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (2)
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References (10)
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