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Volumn 594, Issue , 2000, Pages 237-242

Stress and stress relaxation study of sputtered PZT thin films for microsystems applications

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPRESSIVE STRESS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PLATINUM; SPUTTER DEPOSITION; STRESS ANALYSIS; STRESS RELAXATION; TENSILE STRESS; THIN FILMS; TITANIUM;

EID: 0033652703     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (2)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.