High strain behavior of composite thin film piezoelectric membranes

Microelectronic Engineering

Volumn 75, Issue 1, 2004, Pages 12-23

  Demir, I ^a   Olson, A L ^a   Skinner, J L ^a   Richards, C D ^a   Richards, R F ^a   Bahr, D F ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

MEMS; PZT; Residual stress

Indexed keywords

BENDING (DEFORMATION); CERAMIC MATERIALS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PRESSURE EFFECTS; RESIDUAL STRESSES; STRAIN; TENSILE STRESS; THICKNESS MEASUREMENT; THIN FILMS;

LEAD ZIRCONATE TITANATE (PZT); MICROELECTROMECHANICAL SYSTEM (MEMS); PIEZOELECTRIC MEMBRANES; PRESSURE PULSES;

PIEZOELECTRIC MATERIALS;

EID: 2942677182     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2003.10.007     Document Type: Conference Paper

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