Integrated electroceramics: Densification and stress development in sol-gel derived thin layers

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 193-200

  Sengupta, Samit S ^a   Park, Sang M ^a,b   Payne, David A ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b Hankuk Aviation University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; DRYING; ELLIPSOMETRY; HEAT TREATMENT; HEATING; LEAD COMPOUNDS; LITHIUM COMPOUNDS; PYROLYSIS; SHRINKAGE; SOL-GELS; STRESS ANALYSIS;

INTEGRATED ELECTROCERAMICS;

DIELECTRIC FILMS;

EID: 0031377404     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019992     Document Type: Article

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