Intrinsic stress dependence of c-axis orientation ratio in PbTiO3 thin films deposited by reactive sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 57-61

  Kweon, S Y ^a   Yi, S H ^a   Choi, S K ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031538720     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580476     Document Type: Article

References (20)

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