Effects of residual stress on the electrical properties of PZT films

Journal of the American Ceramic Society

Volumn 90, Issue 4, 2007, Pages 1077-1080

  Lee, Jae Wung ^a   Park, Chee Sung ^a   Kim, Miyoung ^a   Kim, Hyoun Ee ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPRESSIVE STRESS; ELECTRIC PROPERTIES; FERROELECTRICITY; MAGNETRON SPUTTERING; PIEZOELECTRICITY; REMANENCE; RESIDUAL STRESSES;

FERROELECTRIC PROPERTIES; PIEZOELECTRIC PROPERTIES; SATURATION POLARIZATION;

LEAD COMPOUNDS;

EID: 34247208163     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2007.01610.x     Document Type: Article

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