Fabrication of a polymer-based torsional vertical comb drive using a double-side partial exposure method

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Chung, Junwei ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; ETCHING; FINITE ELEMENT METHOD; POLYNOMIAL APPROXIMATION;

DOUBLE-SIDE PARTIAL EXPOSURE; DRIVING VOLTAGE; VERTICAL COMB DRIVE (VCD);

PHOTORESISTORS;

EID: 42549172323     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035014     Document Type: Article

References (29)

1. Tang W C, Nguyen T H and Howe R T 1998 Laterally driven polysilicon resonant microstructures Tech. Dig. IEEE Micro Electro Mech. Syst. Workshop (Salt Lake City) pp 53-9
2. Ye W, Mukherjee S and MacDonald N C 1998 Optimal shape design of an electrostatic comb drive in microelectromechanical systems J. Microelectromech. Syst. 7 16-26
3. Hirano T, Furuhata T, Gabriel K J and Fujita H 1992 Design, fabrication, and operation of submicron gap comb-drive microactuators J. Microelectromech. Syst. 1 52-9
4. Lin L, Howe R T and Pisano A P 1998 Microelectromechanical filters for signal processing J. Microelectromech. Syst. 7 286-94
5. Park K Y, Lee W C, Jang H S, Oh Y S and Ha B J 1998 Capacitive sensing type surface micromachined silicon accelerometer with a stiffness tuning capability Dig. IEEE/ASME MEMS Workshop (Heidelberg, Germany) pp 637-42
6. Tanaka K, Mochida Y, Sugimoto M, Moriya K, Hasegawa T, Atsuchi K and Ohwada K 1995 A micromachined vibrating gyroscope Sensors Actuators A 50 111-5
7. Juan W-H and Pang S W 1998 High-aspect-ratio Si vertical micromirror arrays for optical switching J. Microelectromech. Syst. 7 207-13
8. Hah D, Huang S T-Y, Tsai J-C, Toshiyoshi H and Wu M C 2004 Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators J. Microelectromech. Syst. 13 279-89
9. Selvakumar A and Najafi K 2003 Vertical comb array microactuators J. Microelectromech. Syst. 12 440-9
10. Lee J-H, Ko Y-C, Kong D-H, Kim J-M, Lee K B and Jeon D-Y 2002 Design and fabrication of scanning mirror for laser display Sensors Actuators A 96 223-30
11. Yeh J-L A, Jiang H and Tien N C 1999 Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator J. Microelectromech. Syst. 8 456-65
12. Hah D, Choi C-A, Kim C-K and Jun C-H 2004 A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror J. Micromech. Microeng. 14 1148-56
13. Milanović V 2004 Multilevel beam SOI-MEMS fabrication and applications J. Microelectromech. Syst. 13 19-30
14. Zhang Q X, Liu A Q, Li J and Yu A B 2005 Fabrication technique for microelectromechanical systems vertical comb-drive actuators on a monolithic silicon substrate J. Vac. Sci. Technol. B 23 32-41
15. Kim J, Park S and Cho D 2001 A novel electrostatic vertical actuator fabricated in one homogeneous silicon wafer using extended SBM technology Transducers '01 pp 756-9
16. Tsai J M-L, Chu H-Y, Hsieh J and Fang W 2004 The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications J. Micromech. Microeng. 14 235-41
17. Jeong K-H and Lee L P 2005 A novel microfabrication of a self-aligned vertical comb drive on a single SOI wafer for optical MEMS applications J. Micromech. Microeng. 15 277-81
18. Hah D, Patterson P R, Nguyen H D, Toshiyoshi H and Wu M C 2004 Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors J. Sel. Top. Quantum Electron. 10 505-13
19. Kim J, Choo H, Lin L and Muller R S 2003 Microfabricated torsional actuator using self-aligned plastic deformation Transducers '03 pp 1015-8
20. Becker H and Heim U 2000 Hot embossing as a method for the fabrication of polymer high aspect ratio structures Sensors Actuators A 83 130-5
21. Lee G-B, Chen S-H, Huang G-R, Sung W-C and Lin Y-H 2001 Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection Sensors Actuators B 75 142-8
22. Becker H and Gärtner C 2000 Polymer microfabrication methods for microfluidic analytical applications Electrophoresis 21 12-26
23. Abgrall P 2007 Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem-a review J. Micromech. Microeng. 17 R15-49
24. Zhao Y and Cui T 2003 Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique J. Micromech. Microeng. 13 430-5
25. Dai W, Lian K and Wang W 2007 Design and fabrication of a SU-8 based electrostatic microactuator Microsyst. Technol. 13 271-7
26. Jeong S J and Wang W 2004 Microaccelerometers using cured SU-8 as structural material Proc. SPIE 5344 115-23
27. Eberhardt W, Gerhäuer Th, Giousouf M, Kück H, Mohr R and Warkentin D 2002 Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers Sensors Actuators A 97-98 473-7
28. Tsai J M-L, Chu H-Y, Hsieh J and Fang W 2004 The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications J. Micromech. Microeng. 14 235-41
29. Jeong K-H and Lee L P 2005 A novel microfabrication of a self-aligned vertical comb drive on a single SOI wafer for optical MEMS applications J. Micromech. Microeng 15 277-81