A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror

Journal of Micromechanics and Microengineering

Volumn 14, Issue 8, 2004, Pages 1148-1156

  Hah, Dooyoung ^a   Choi, Chang Auck ^a   Kim, Chang Kyu ^a   Jun, Chi Hoon ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATICS; ENERGY UTILIZATION; ETCHING; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTICAL COMMUNICATION; TORQUE;

BURIED OXIDE (BOX) LAYERS; COMB-DRIVE ACTUATORS; DEEP REACTIVE ION ETCHING (DRIE); DELAY-MASK PROCESS (DMP); SILICON-ON-INSULATOR (SOI) WAFERS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 4243182631     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/8/005     Document Type: Article

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