Multilevel beam SOI-MEMS fabrication and applications

Journal of Microelectromechanical Systems

Volumn 13, Issue 1, 2004, Pages 19-30

  Milanović, Veljko ^a  

^a Adriatic Research Institute   (United States)

Author keywords

Deep reactive ion etch (DRIE); Inductively coupled plasma (ICP) etch; Microfabrication; Micromirrors; Optical MEMS; Self alignment; SOI MEMS; Vertical combdrives

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); INDUCTIVELY COUPLED PLASMA; MASKS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

MICROMIRRORS; MULTILEVEL BEAMS; SILICON BEAMS;

MICROELECTRONIC PROCESSING;

EID: 1542604570     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823226     Document Type: Article

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