Laterally driven polysilicon resonant microstructures.

Volumn , Issue , 1989, Pages 53-59

  Tang, William C ^a   Nguyen, Tu Cuong H ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS--MICROSTRUCTURE; ELECTRIC FILTERS, ELECTROMECHANICAL; SPRINGS--VIBRATIONS;

INTERDIGITATED FINGER (COMB); LINEAR PLATES; POLYSILICON; SERPENTINE SPRINGS; TORSIONAL PLATES;

SEMICONDUCTING SILICON;

EID: 0024864072     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)