Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 473-477

  Eberhardt, W ^a   Gerhausser Th ^a   Giousouf, M ^c   Kuck H ^b   Mohr, R ^b   Warkentin, D ^b  

^a Hahn Schickard Gesellschaft   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

^c FESTO AG AND CO KG   (Germany)

Author keywords

Accelerometer; Composite; Mechanical beam; Molded interconnect device

Indexed keywords

ACCELEROMETERS; COPPER; ELECTROLESS PLATING; GOLD; INJECTION MOLDING; LIQUID CRYSTAL POLYMERS; MECHANICAL PROPERTIES; MICROACTUATORS; MICROSENSORS; NICKEL; PHOSPHORUS;

METALLIZED POLYMERS; MICROMECHANICAL SENSOR; MINIATURIZED MECHANICAL POLYMER BEAMS; POLYMER DEVICES;

FABRICATION;

EID: 0036544046     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00830-5     Document Type: Conference Paper

References (11)

1. Silicon as a mechanical material
2. Herstellungsverfahren, Gebrauchsanforderungen und Materialkennwerte Räumlicher Elektronischer Baugruppen 3-D-MID, Forschungsvereinigung 3-D MID
3. Kunststoffmetallisierung
4. Funktionelle Chemische Vernickelung
5. Spritzgieß-Werkzeuge
6. Beschleunigungssensoren in Silizium-Techniken
7. Fabrication of a 3-D differential-capacitive acceleration sensor by UV-LIGA
8. A highly symmetrical capacitive triaxial accelerometer
9. Kunststoff Taschenbuch