Microaccelerometers Using Cured SU-8 As Structural Material

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 115-123

  Jeong, Seok Jae ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Inertia sensor; Micro accelerometer; Polymer sensors; SU 8

Indexed keywords

ACCELEROMETERS; PHOTOLITHOGRAPHY; POLYMERS; SENSORS; THERMODYNAMIC STABILITY; ULTRAVIOLET RADIATION;

INERTIA SENSORS; MICROACCELEROMETERS; POLYMER SENSORS; SU-8;

MICROELECTROMECHANICAL DEVICES;

EID: 2142771410     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530783     Document Type: Conference Paper

References (14)

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