Vertical comb array microactuators

Journal of Microelectromechanical Systems

Volumn 12, Issue 4, 2003, Pages 440-449

  Selvakumar, Arjun ^a   Najafi, Khalil ^b  

^a Input Output Inc   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Electrostatic actuators; Micro electromechanical systems (MEMS); Microactuators; Micromachining; Vertical deflection

Indexed keywords

ACCELEROMETERS; LEAD COMPOUNDS; MICROMACHINING; PIEZOELECTRIC MATERIALS; THERMODYNAMIC STABILITY;

MICROMECHANISMS; MICRONS; VERTICAL COMB ARRAY MICROACTUATORS;

MICROACTUATORS;

EID: 0041886949     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.811752     Document Type: Article

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