The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications

Journal of Micromechanics and Microengineering

Volumn 14, Issue 2, 2004, Pages 235-241

  Tsai, Julius Ming Lin ^a   Chu, Huai Yuan ^a   Hsieh, Jerwei ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL ATTENUATORS; VERTICAL COMB ACTUATORS (VCA);

CHEMICAL BONDS; ELECTRIC ATTENUATORS; ELECTRIC POTENTIAL; MICROMACHINING; OPTICAL SWITCHES; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY; TORSIONAL STRESS;

SEMICONDUCTING SILICON;

EID: 1242287809     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/2/010     Document Type: Article

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