Stress, microstructure and mechanical properties of graded multilayer tetrahedral amorphous carbon films

Applied Physics A: Materials Science and Processing

Volumn 91, Issue 3, 2008, Pages 529-533

  Han, Xiao ^a   Zhu, Jiaqi ^a   Han, Jiecai ^a   Tan, Manlin ^a   Gao, Wei ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; ELASTIC MODULI; MICROSTRUCTURE; MULTILAYER FILMS; PROTECTIVE COATINGS; RAMAN SCATTERING; STRESS ANALYSIS;

FILTERED CATHODIC VACUUM ARC (FCVA); MULTILAYER STRUCTURE;

CARBON FILMS;

EID: 42449142924     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4443-0     Document Type: Article

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