Nanoindentation and nanoscratching studies of amorphous carbon films

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 558-562

  Charitidis, C ^a   Logothetidis, S ^a   Douka, P ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Amorphous carbon; Hardness; Mechanical properties; Sputtering

Indexed keywords

ADHESION; BOND STRENGTH (MATERIALS); CARBON; ELASTIC MODULI; FAILURE ANALYSIS; HARDNESS TESTING; ION BOMBARDMENT; MAGNETRON SPUTTERING; PLASTIC DEFORMATION; SILICON;

NANOINDENTATION TESTING; SCRATCH RESISTANCE;

AMORPHOUS FILMS;

EID: 0032621358     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00285-4     Document Type: Article

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