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Volumn 11, Issue 7, 2002, Pages 1454-1459
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A new method for evaluating the scratch resistance of diamond-like carbon films by the nano-scratch technique
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Author keywords
Atomic force microscopy (AFM); Diamond like carbon (DLC); Nano scratch; Nanoindentation; Thin films
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Indexed keywords
ADHESION;
CRACK INITIATION;
DELAMINATION;
NANOTECHNOLOGY;
PLASTIC DEFORMATION;
SEMICONDUCTING SILICON;
SUBSTRATES;
COHESION STRENGTH;
DIAMOND LIKE CARBON FILMS;
COATING;
DIAMOND-LIKE CARBON;
FILM;
PROTECTION;
RESISTANCE;
SCRATCHING;
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EID: 0036645507
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00045-6 Document Type: Article |
Times cited : (40)
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References (25)
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