Density changes with substrate negative bias for ta-C films deposited by filter cathode vacuum arc

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 14, Issue SUPPL. 2, 2004, Pages 238-242

  Tan, Man Lin ^a   Zhu, Jia Qi ^a   Han, Jie Cai ^a   Meng, Song He ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Density; Substrate negative bias; ta C films; X ray reflectivity

Indexed keywords

CARBON; DENSITY (SPECIFIC GRAVITY); DEPOSITION; ELASTIC MODULI; HARDNESS; MEASUREMENTS; MECHANICAL PROPERTIES;

FILTER CATHODE VACUUM ARC SYSTEM; SUBSTRATE NEGATIVE BIAS; TETRAHEDRAL AMORPHOUS CARBON FILMS; X RAY REFLECTIVITY;

AMORPHOUS FILMS;

EID: 11444266758     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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