Structural and tribological characterization of multilayer ta-C films prepared by filtered cathodic vacuum arc with substrate pulse biasing

Surface and Coatings Technology

Volumn 132, Issue 2-3, 2000, Pages 228-232

  Sheeja, D ^a   Tay, B K ^a   Lau, S P ^a   Shi, X ^a   Ding, X ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Filtered cathode vacuum arc; Multilayer; Ta C films

Indexed keywords

CARBON; DEPOSITION; ELASTIC MODULI; RAMAN SPECTROSCOPY; TRIBOLOGY; VACUUM APPLICATIONS;

AMORPHOUS CARBON; FILTERED CATHODE VACUUM ARC (FCVA) TECHNIQUE;

AMORPHOUS FILMS;

CATHODIC ARC PLASMA DEPOSITION; COATING; HARDNESS; STRUCTURAL ANALYSIS; TRIBOLOGY;

EID: 0034292445     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00848-3     Document Type: Article

References (16)