Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

Journal of Applied Physics

Volumn 95, Issue 7, 2004, Pages 3509-3515

  Gan, Zhenghao ^a   Zhang, Yuebin ^a   Yu, Guoqing ^a   Tan, C M ^a   Lau, S P ^a   Tay, B K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CATHODES; COMPUTER SIMULATION; DEFORMATION; DEPOSITION; ELASTIC MODULI; FINITE ELEMENT METHOD; HARDNESS; MICROELECTROMECHANICAL DEVICES; RAMAN SCATTERING; STRENGTH OF MATERIALS; THERMAL EFFECTS; VACUUM;

CATHODIC VACUUM ARC; THIN FILM DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 1942456677     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1667005     Document Type: Article

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