Nitrogen-induced interface defects in Si oxynitride

Physical Review B - Condensed Matter and Materials Physics

Volumn 77, Issue 10, 2008, Pages

  Lee, Eun Cheol ^a  

^a Gachon University College of Medicine   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 41449101420     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.77.104108     Document Type: Article

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