Electrically inactive nitrogen complex in Si oxynitride

Physical Review B - Condensed Matter and Materials Physics

Volumn 66, Issue 23, 2002, Pages 2332051-2332054

  Lee, Eun Cheol ^a   Chang, K J ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

METAL COMPLEX; NITROGEN DERIVATIVE; SILICON DERIVATIVE; SILICON OXYNITRIDE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL BOND; CHEMICAL REACTION; CHEMICAL STRUCTURE; COMPLEX FORMATION; ELECTRIC ACTIVITY; FILM; HYDROGEN BOND; METAL BINDING; MOLECULAR STABILITY;

EID: 0037116086     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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