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Volumn 115, Issue , 1996, Pages 277-289

Electron paramagnetic resonance study of defects in oxidized and nitrided porous Si and Si(1-x)Ge(x)

Author keywords

defects; electron paramagnetic resonance

Indexed keywords

CRYSTAL DEFECTS; DIELECTRIC PROPERTIES; EPITAXIAL GROWTH; INTERFACES (MATERIALS); MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; NITRIDING; OXIDATION; PARAMAGNETIC RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SURFACE PROPERTIES; SYNTHESIS (CHEMICAL);

EID: 0342936248     PISSN: 09277757     EISSN: None     Source Type: Journal    
DOI: 10.1016/0927-7757(96)03604-7     Document Type: Conference Paper
Times cited : (12)

References (46)
  • 2
    • 85020622221 scopus 로고    scopus 로고
    • See for example the proceedings of EMRS conferences on porous Si in 1994 and 1995
    • See for example the proceedings of EMRS conferences on porous Si in 1994 and 1995.
  • 5
    • 0003523588 scopus 로고
    • Effects of the reduction of dielectric constant in nanoscale silicon
    • D. Bensahel, L.T. Canham and S. Ossicini (Eds), CNET, France, 1-3 March 1993, Kluwer, Dordrecht
    • R. Tsu and D. Babic, Effects of the reduction of dielectric constant in nanoscale silicon, in D. Bensahel, L.T. Canham and S. Ossicini (Eds), Optical Properties of Low Dimensional Silicon Structures, CNET, France, 1-3 March 1993, Kluwer, Dordrecht, 1993, p. 203.
    • (1993) Optical Properties of Low Dimensional Silicon Structures , pp. 203
    • Tsu, R.1    Babic, D.2
  • 12
    • 0343874915 scopus 로고
    • ISMRCIS, Münster, FRG, 1986
    • K.L. Brower, Z. Phys. Chem., N. F., 151 (1987) 177. (ISMRCIS, Münster, FRG, 1986).
    • (1987) Z. Phys. Chem., N. F. , vol.151 , pp. 177
    • Brower, K.L.1
  • 44
    • 19044373220 scopus 로고
    • Optical properties of low dimensional silicon structures
    • D. Bensahel, L.T. Canham and S. Ossicini (Eds.)
    • L.T. Canham, in D. Bensahel, L.T. Canham and S. Ossicini (Eds.), Optical Properties of Low Dimensional Silicon Structures, Nato AST Ser. Appl. Sci., 244 (1993) 81.
    • (1993) Nato AST Ser. Appl. Sci. , vol.244 , pp. 81
    • Canham, L.T.1
  • 46
    • 85020688755 scopus 로고    scopus 로고
    • Ph.D. Thesis, University of Paris 7, 1995
    • A. Grosman, Ph.D. Thesis, University of Paris 7, 1995.
    • Grosman, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.